周畅
上海微电子装备有限公司,产品总监

个人简介

周畅博士2003年毕业于华中科技大学,教授级高级工程师,国家科技专家库专家,国家百千万人才工程创新团队负责人。现任上海微电子装备有限公司产品总监、技术副总监,负责公司平板设备产品策划及研制。

周畅博士具有10年以上高端微纳制造装备研发经验,并在系统工程、光学工程、精密机械、自动控制及量测等专业技术领域,在大型复杂项目管理及产品市场应用等方面具有丰富的工程经验。曾参加完成国家科技部“100nm扫描投影光刻机研制”项目,负责完成国家02重大专项“先进封装光刻机产品研制”项目,并负责完成G2.5及G4.5高精度TFT扫描投影曝光机研制。目前公司先进封装光刻机产品在国内市场占有率超过90%,全球市场占有率超过30%。

Dr Zhou Chang serves as product director of SMEE, and also serves as deputy director of technology of SMEE. He is responsible for products planning and development of FPD equipments.

Dr. Zhou has more than 10 years R&D experience of high-end semiconductor equipments. He has participated in the R&D project of “100nm projection step&scan lithography”, and was responsible for the development of ” Advanced Packaging Lithography” and G2.5/G4.5 high resolution TFT scanning lithography.

Zhou Chang received his doctor degree from Huazhong University of Science and Technologyin 2003.